Calculations of absolute electron-impact ionization cross sections for molecules of technological relevance using the DM formalism

The Deutsch-Mark (DM) formalism has been used to calculate absolute electro n impact ionization cross sections for the technologically relevant molecul es NO2, BF3, BCl3, Hx (X = F, Cl, Br, J), Br-2, J(2), WF6, GeHx (x = 1-4), TMS (tetramethylsilane). HMDSO (hexamethyldisiloxane), and TEOS (tetraethox ysilane). Our calculations are compared with experimental data, where avail able, and with calculated cross sections based on the Binary-Encounter-Beth e (BEB) method of Kim and Rudd. In some cases, comparisons are also made wi th predictions from the modified additivity rule (MAR). (Int J Mass Spectro m 206 (2001) 13-25) (C) 2001 Elsevier Science B.V.