Phase equilibria in transition metal Al-Ga-N systems and thermal stabilityof contacts to AlGaN

As a first step in predicting the phase equilibria in TM-Al-Ga-N systems, w here TM denotes a transition metal from the first three transition series, phase equilibria are calculated in the TM-Al-N systems, and the condensed p hases in equilibrium with both AlN and N-2 gas are discussed with respect t o the position of the transition metal in the periodic table, temperature, and nitrogen pressure. Possible phases for use as stable electrical contact s to AlGaN are identified using these predictions, similar previous predict ions for the TM-Ga-N systems and experimental findings.