Novel cyclopentadienyl silanes and disilanes: synthesis, structure and gas-phase pyrolysis

The new chloro(cyclopentadienyl)silanes Cp'SiHyCl3-y, (Cp' = Me4EtC5, y = 1 : 1; Cp' = Me4C5H, y = 1: 2; y = 0: 3; Cp' = Me3C5H2, y = 1: 4 and pentachl oro(cyclopentadienyl)disilanes Cp'Si2Cl5 (Cp' = Me5C5 5, Me4EtC5 6, Me4C5H 7, Me3C5H2 8, Me3SiC5H4 9) are synthesized in good yields via metathesis re actions. Treatment of 1-9 with LiAlH4 leads under CI-H exchange to the hydr idosilyl compounds Cp'SiH3 (Cp' = Me4EtC5 10, Me4C5H 11, Me3C5H2 12) and to the hydridodisilanyl compounds Cp'Si2H5 (Cp' = Me5C5 13, Me4EtC5 14, Me4C5 H 15, Me3C5H2 16, Me3SiC5H4 17). Complexes 1-17 are characterized by H-1, C -13, and Si-29-NMR spectroscopy, IR spectroscopy, mass spectrometry and CH- analysis. The structures of 6, 7 and 9 are determined by single-crystal X-r ay diffraction analysis. Pyrolysis studies of the cyclopentadienylsilanes 1 0-12 and disilanes 13-17 show their suitability as precursors in the MOCVD process. (C) 2001 Elsevier Science B.V. All rights reserved.