ORMOCER (R) s for optical interconnection technology

New inorganic-organic hybrid polymers (ORMOCER (R)s) for integrated optical and opto-electronic devices were synthesized by sol-gel processing of func tionalized alkoxysilanes. Process parameters (catalyst, temperature etc.) w ere optimized to achieve highly reproducible low cost materials which are p hotopatternable even in higher layer thickness (presently 100 mum within on e step). The resulting materials have low optical losses at the most important wavel engths for telecommunications in the NIR range (0.3 dB/cm at 1320 nm, 0.6 d B/cm at 1550 nm) and a variety of additional advantageous properties for op tical interconnection technology and production of opto-electronic devices: good wetting and adhesion on various substrates (e.g. glass, silicon and s everal polymers), low processing temperatures (post-bake at 150 degreesC) a nd high thermal stability (decomposition at 270 degreesC) compared to alter native opto-polymers for NIR applications. A further advantage is a tunable refractive index, which can be achieved by mixing different resins.