Textured PLCT thin films prepared on Pt/Ti/SiO2/Si substrate by metal-organic decomposition

Textured calcium modified (Pb,La)TiO3 (PLCT) films were deposited on Pt/Ti/ SiO2/Si substrates by using a metal-organic decomposition (MOD) process. Th e PLCT films exhibit good ferroelectric properties, a very low leakage curr ent and a sharp PLCT/Pt interface. The (100) texture of the PLCT film is gr owth-controlled; the (100) oriented grains grow preferentially so as to min imize the surface energy. Particularly, the (100) preferred orientation is easy to form in the PLCT film with a layered structure for which the substr ate almost does not affect the nucleation and growth of the film.