The x-ray absorption fine structure (XAFS) technique has been employed to i
nvestigate the local structure and valency about Mn and Fe ions in the III-
V diluted magnetic semiconductors In1-xMnxAs and Ga1-xFexAs, prepared by mo
lecular-beam-epitaxy under various growth conditions. These new systems are
promising magnetic materials of considerable current interest and with imp
ortant technical applications including photo-carrier induced magnetism and
spin-polarized current devices. The local structure around the magnetic io
ns can play a pivotal role in affecting the magnetic properties of these se
miconductors. Local structure information obtained from XAFS has provided t
he first direct evidence that the magnetic impurities can indeed substitute
for the cation host atoms in samples prepared under appropriate conditions
.