Low molecular weight poly(ethylene glycol) silanes (PEG silanes) have been
grafted onto the surface of silicon wafers in a one-step procedure yielding
ultrathin and stable PEG monolayers. Structural investigation by means of
X-ray reflectivity provided data on the thickness of the PEG monolayers. Th
e layer thickness varied between 10 and 17 A depending on the PEG silane co
ncentration applied. These results have been confirmed by X-ray photoelectr
on spectroscopy measurements Atomic force microscopy data indicate very smo
oth and homogeneous coverages with roughnesses of less than 3 Angstrom . Th
e PEG layers are hydrophilic as determined with advancing water contact ang
les between 36 and 39 degrees.