Monte Carlo simulation of multiple and plural scattering in elastic recoildetection

In heavy ion elastic recoil detection measurements, the multiple and plural scattering of in-going primary ions and out-coming recoiled atoms introduc es a major problem for a reliable and accurate analysis of concentration di stributions in samples. In this study, a Monte Carlo (MC) code including mu ltiple and plural scattering has been developed for simulation of elastic r ecoil detection energy spectra. Simulated spectra are in a good agreement w ith experimental spectra. The influence of the multiple or plural scatterin g on the energy spectra is discussed. Applications of the MC approach in el astic recoil detection analysis are considered. (C) 2001 Elsevier Science B .V. All rights reserved.