On the role of plasma-surface interactions in dc magnetron discharges in Ar-N-2 gas mixtures

A plasma model of a de magnetron glow discharge of an Ar-N-2 mixture, with an aluminium target, is extended in order to explicitly include plasma-surf ace interactions. Theoretical results are compared with experimental data f rom optical emission spectroscopy of Al. The effect of the nitrogen concent ration is studied. The theoretical calculation trends are in good agreement with the experimental results. The present work allows (1) the theoretical evaluation of the concentration of sputtered Al species and (2) the evalua tion of the relative roles of the sputtering mechanisms and the contributio n of the various species.