C. Camerlingo et al., STEP-EDGE JUNCTION FABRICATION BY A SI-YBCO REACTIVE PATTERNING TECHNIQUE, Physica. C, Superconductivity, 232(1-2), 1994, pp. 44-48
An improved procedure for fabricating step-edge Josephson junctions by
YBCO on NdGaO3 substrates is described. It is based on a reactive pat
terning of the superconducting film geometry by using a SiO(x) inhibit
process. SQUID's have been fabricated following this technique. Preli
minary measurements on the transport properties in single junctions an
d on the magnetic response in DC SQUID's are reported. Promising resul
ts have been obtained at T = 4.2 K.