Sb-doped SrTiO3 transparent semiconductor thin films

Optically transparent Sb-doped SrTiO3 thin films with a transmittance highe r than 95% in most of the visible region have been grown on SrTiO3 (001) su bstrate by pulsed laser deposition. The films behave as an n-type semicondu ctor between 10 K and room temperature. The carrier concentration and mobil ity of the films at room temperature are similar to5.8 x 10(17) cm(-3) and similar to6.4 cm(2)/V s, respectively. X-ray photoelectron spectroscopy mea surement reveals that the delocalized electrons from the Sb dopants give ri se to deep impurity levels within the band gap of the parent compound, whic h are responsible for the electrical conduction observed. The wide band gap and low density of states in the conduction band account for transparency of the films. (C) 2001 American Institute of Physics.