Parallel atomic force microscopy with optical interferometric detection

Citation
T. Sulchek et al., Parallel atomic force microscopy with optical interferometric detection, APPL PHYS L, 78(12), 2001, pp. 1787-1789
Citations number
18
Categorie Soggetti
Apllied Physucs/Condensed Matter/Materiales Science
Journal title
APPLIED PHYSICS LETTERS
ISSN journal
00036951 → ACNP
Volume
78
Issue
12
Year of publication
2001
Pages
1787 - 1789
Database
ISI
SICI code
0003-6951(20010319)78:12<1787:PAFMWO>2.0.ZU;2-M
Abstract
We have developed an atomic force microscope that uses interferometry for p arallel readout of a cantilever array. Each cantilever contains a phase sen sitive diffraction grating consisting of a reference and movable set of int erdigitated fingers. As a force is applied to the tip, the movable set is d isplaced and the intensity of the diffracted orders is altered. The order i ntensity from each cantilever is measured with a custom array of silicon ph otodiodes with integrated complementary metal-oxide-semiconductor amplifier s. We present images from five cantilevers acquired in the constant height mode that reveal surface features 2 nm in height. The interdigital method f or cantilever array readout is scalable, provides angstrom resolution, and is potentially simpler to implement than other methods. (C) 2001 American I nstitute of Physics.