A DEVICE FOR MEASUREMENTS OF THE CURVATURE OF POLISHED PLATES AND ITSAPPLICATION TO DETERMINING PIEZOELECTRIC COEFFICIENTS OF FILMS

Authors
AYUPOV BM KAMINSKII VV
Citation
Bm. Ayupov et Vv. Kaminskii, A DEVICE FOR MEASUREMENTS OF THE CURVATURE OF POLISHED PLATES AND ITSAPPLICATION TO DETERMINING PIEZOELECTRIC COEFFICIENTS OF FILMS, Instruments and experimental techniques, 40(2), 1997, pp. 289-291
Citations number
16
Categorie Soggetti
Instument & Instrumentation",Engineering
Journal title
Instruments and experimental techniques → ACNP
ISSN journal
00204412
Volume
40
Issue
2
Year of publication
1997
Pages
289 - 291
Database
ISI
SICI code
0020-4412(1997)40:2<289:ADFMOT>2.0.ZU;2-R
Abstract
A simple method for determining the curvature of almost plane plates b ased on measurements of the distance between the reflected light beams is described. The arrangements of the device implementing this method and the attachment for straining samples are presented. The use of bo th devices makes it possible, for example, to measure the resistive-st rain effect in thin films on substrates.