We have investigated the effects of grain-boundary diffusion (GBD) at
elevated temperatures on the Auger-electron-spectroscopy (AES) sputter
-depth profiles of Cr-Ag bilayers and the GBD process of Ag atoms in C
r. In the case of the Cr-Ag bilayer system, the general surface accumu
lation method could not be used because a sufficient accumulation time
could not be established for the top Cr layer which is vulnerable to
oxidation. This fact suggests the need to use a modified surface accum
ulation method. The GBD coefficients of Ag atoms in Cr grain boundarie
s were estimated by our modified surface-accumulation method. The GBD
parameters for Ag in Cr along the grain boundaries were as follows : t
he activation energy and the pre-exponential factor for GBD were 0.33
eV and 4.8 x 10(-9) cm(2), respectively.