Statistical modeling of 3-D parallel-plate embedded capacitors using MonteCarlo simulation

Examination of the statistical variation of integrated passive components i s crucial for designing and characterizing the performance of multichip mod ule (MCM) substrates. In this paper, the statistical analysis of parallel p late capacitors with gridded plates manufactured in a multilayer low temper ature cofired ceramic (LTCC) process is presented. A set of integrated capa citor structures is fabricated, and their scattering parameters are measure d for a range of frequencies from 50 MHz to 5 GHz, Using optimized equivale nt circuits obtained from HSPICE, mean and absolute deviation is calculated for each component of each device model. Monte Carlo Analysis for the capa citor structures is then performed using HSPICE. Using a comparison of the Monte Carlo results and measured data, it is determined that even a small n umber of sample structures, the statistical variation of the component valu es provides an accurate representation of the overall capacitor performance .