Calibration of fly height measured by scattered total internal reflection

Fly height was measured using Scattered Total Internal Reflection (SCATIR), A calibration method for this technique was developed, and the results wer e compared to those from a Phase Metrics Dynamic Fly Height Tester (DFHT) I I. Measurements from the two methods on the same slider agreed well in the region from 20-80 nm, SCATIR is at least comparable to three-wavelength int erferometry, and potentially superior in that (i) signal intensity increase s as the fly height decreases, (ii) calibration and measurement occur in on e location, and (iii) the sensitivity can be optimized for a desired range of fly height.