A. Sato et al., Improvement of crystallinity and magnetic characteristics of ferromagnetic-Co77Cr20Ta3/paramagnetic-Co65Cr35 bilayered films, IEEE MAGNET, 36(5), 2000, pp. 2936-2938
In order to improve crystallographic and magnetic characteristics of Co-Cr-
Ta recording layers, optimization of substrate temperature T-s for the seed
layers was investigated. Crystalline orientation and magnetic characterist
ics of the ferromagnetic-Co77Cr20Ta3 layers were improved by adjusting T-s
of the paramagnetic-Co-66 Cr-35 Seed layer in the range of 150-200 degrees
C, It was found that deposition of the seed layer with excellent c-axis ori
entation is effective to enhance perpendicular magnetic anisotropy and to p
repare an ultrathin ferromagnetic recording layer. T-s-optimized deposition
of the seed layers will be useful for fabricating the perpendicular magnet
ic recording media.