This paper presents the influence of ion implantation and subsequent anneal
ing on magneto optical multilayers of Tb-Fe and alloys of TbFeCo, The layer
s are prepared by sputtering and have a perpendicular magnetic anisotropy (
PMA). After the implantation of heavy ions the PMA changes in dependence on
the ion fluence to the in-plane state and effects the stresses in the allo
y layers.