Giant Magnetostriction (GMS) reported until now in thin films using rare ea
rth-transition metal RM2 (R = Tb, Sm, and hP = Fe, Co) compounds, presents
in most of cases an isotropic or quasi-isotropic magnetoelastic (ME) behavi
or, A large change of the ME coefficient b under the lowest possible extern
al field is required in order to improve the sensitivity of these materials
which are interesting for their application in the microelectromechanical
systems (MEMS). The present paper shows the possibility of improving strong
ly both the ME coefficient and sensitivity, Optimized ME properties are cor
related with the sputtering parameters such as the RF power P-rf and the sp
uttering gas pressure P-Ar.The magnetostriction increases with P-rf up to v
ery large saturation values not observed until now in TbFe films (Deltal/l
= 1300 ppm or b(gamma ,2) = 50 Mpa at 20 kOe) due to a structural change fr
om amorphous at low P-rf to crystallized phase at a high P-rf as confirmed
from XRD. When a bias magnetic field H-d is applied on the film during depo
sition it is observed a strong change in the structural, elastic, magnetic
and ME properties. N-d keeps the amorphous phase even at high P-rf which in
duces a reduction of the ME "linewidth" but an increase of the GMS sensitiv
ity.