Application of bi-directional thin-film micro wire array to RF integrated spiral inductors

Authors
Yamaguchi, M Suezawa, K Baba, M Arai, KI Shimada, Y Tanabe, S Itoh, K
Citation
M. Yamaguchi et al., Application of bi-directional thin-film micro wire array to RF integrated spiral inductors, IEEE MAGNET, 36(5), 2000, pp. 3514-3517
Citations number
7
Categorie Soggetti
Apllied Physucs/Condensed Matter/Materiales Science
Journal title
IEEE TRANSACTIONS ON MAGNETICS
ISSN journal
00189464 → ACNP
Volume
36
Issue
5
Year of publication
2000
Part
1
Pages
3514 - 3517
Database
ISI
SICI code
0018-9464(200009)36:5<3514:AOBTMW>2.0.ZU;2-D
Abstract
Vertically and horizontally aligned micro wire arrays with the magnetic har d axis perpendicular to the length of the wire are micro-fabricated from ze ro-magnetostrictive CoNbZr film. Annealing produced a 180-degree domain pat tern, small coercive force and good permeability, Using the micro wire arra y with line/space = 9 mum/(2) mum, an RF integrated inductor exhibited L = 7.5 nH(+11% of air core's), R = 7.6 Omega and Q = 6.3 (almost same as the a ir core's).