Sh. Leong et al., Study of in-depth defects using magneto-optical Kerr Effect by measuring the magnetic hardness coefficient in magnetic thin films, IEEE MAGNET, 36(5), 2000, pp. 3611-3613
A Magneto-optical Kerr Effect (MOKE) system was built and used for acquirin
g saturation magnetization curves and measuring the magnetic hardness coeff
icient, a of magnetic thin film samples. Co thin films were sputtered on gl
ass substrate under various sputtering conditions. The magnetic hardness co
efficient was measured using the MOKE setup. Results for a (Oe) were furthe
r correlated using transmission electron microscopy (TEM) and X-ray diffrac
tion (XRD) analysis. It was found that a (Oe), a useful indicator for in-de
pth defects in Co films, increased with both working and base pressure but
decreased with higher deposition temperatures. This trend is in agreement w
ith well-known microstructure control techniques by changing sputtering par
ameters.