A procedure was proposed for low-temperature vapor-phase In doping of Pb1-x
SnxTe films grown by molecular-beam epitaxy on BaF2 substrates. Diffusion a
nnealing was call icd out in a hydrogen atmosphere in the presence of a vap
or source identical in composition to the film and a dopant source at tempe
ratures which were, in most cases, no higher than the growth temperature (3
00-460 degreesC). The effect of diffusion annealing on the composition, tra
nsport properties, and homogeneity of both undoped and In doped films was e
xamined. The results suggest that indium is transported in the vapor phase
in the form of indium tellurides resulting from the reaction between Te vap
or and liquid In.