O. Simonetti et al., Extraction of the oxide thickness using a MOS structure quantum model for SiO2 oxide < 5 nm thick films, J NON-CRYST, 280(1-3), 2001, pp. 110-115
In this paper, we present a full quantum model of metal oxide semiconductor
capacitance based on a self-consistent resolution of Schrodinger and Poiss
on equations. The model is used in accumulation to extract the oxide thickn
ess of N+ polycrystalline silicon-SiO2-P silicon capacitors in the range 2-
5 nm. The extraction results are in agreement with reference ellipsometric
measurements to < +/- 14%. We also show the necessity of a quantum computat
ion of the gate capacitance for high substrate doping and low oxide thickne
ss. The influence of the tunneling current is also discussed. (C) 2001 Else
vier Science B.V. All rights reserved.