In the past decade, the optical method called moire interferometry has matu
red rapidly to emerge as an invaluable tool, proved by many industrial and
scientific applications. It has been applied to numerous problems in engine
ering mechanics. It measures in-plane displacement fields with high sensiti
vity and high spatial resolution. This paper reviews current practices of m
oire interferometry and its extensions. Applications in diverse fields are
addressed to demonstrate the wide applicability of the method, especially t
he recent applications for thermal deformation analyses of microelectronics
devices. Speculation on future developments and practices is presented.