A THEORETICAL-MODEL FOR LASER REMOVAL OF PARTICLES FROM SOLID-SURFACES

A theoretical model for laser cleaning of microparticles from solid su rfaces was established by taking the adhesion force (van der Waals for ce) and cleaning force (due to thermal expansion) into account. The cl eaning conditions and threshold can be obtained from this model. Theor etical predictions have been verified by the experimental results for removing aluminium particles from a quartz substrate. It was found tha t laser irradiation from the back of the substrate is more effective i n removing particles with different sizes than that from the front. Wi th laser irradiation from the back, large particles can be removed mor e easily than small ones. However, with laser irradiation from the fro nt, smaller particles can be removed more easily.