We have observed a quantized limiting value of the thermal conductance for
each propagating phonon channel in a one-dimensional (1D), ballistic phonon
waveguide: g(0) = pi (2)k(B)(2)T/3h. To achieve this we have developed nan
ostructures with full three-dimensional relief that incorporate integral th
ermometers and heaters. These devices are comprised of an isolated thermal
reservoir (phonon cavity) suspended above the sample substrate by four narr
ow insulating beams (phonon waveguides) with lateral dimensions similar to
100 nm. We employ DC SQUID noise thermometry to measure the temperature of
the phonon cavity non-perturbatively. Direct electrical contact from the su
spended nanostructure to the room-temperature environment, crucial for thes
e experiments, is attained by means of a very significant level of electric
al filtering. These first experiments provide access to the mesoscopic regi
me for phonons, and open intriguing future possibilities for exploring ther
mal transport in very small systems. We are currently adapting and improvin
g the ultrasensitive, extremely low dissipation DC SQUID techniques utilize
d in this work toward the ultimate goal of detecting individual thermal pho
nons. (C) 2001 Elsevier Science B.V. All rights reserved.