The formation of vertically and laterally ordered dot superstructures in se
lf-organized quantum dot superlattices is described. The ordering is based
on the long-range elastic interactions between the strained self-assembled
quantum dots, providing a driving force for a spatially correlated dot nucl
eation. For various materials systems, different types of ordered structure
s have been observed, ranging from vertically aligned dot superlattices for
Si/Ge or III-V semiconductors to a fee-like ABCABC... stacking in IV-VI ma
terials. It is shown that the elastic anisotropy of the spacer material pla
ys a crucial role in this self-organization process. In particular, for mat
erials with very high elastic anisotropy and growth orientations parallel t
o an elastically soft direction, layer-to-layer dot correlations inclined t
o the growth direction can be formed. This is shown to he particularly effe
ctive for inducing a lateral ordering of the dots within the growth plane,
which can lead to a significant narrowing of the dot size dispersion. These
conclusions are also supported by Monte Carlo growth simulations. (C) 2001
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