Fabrication of SiCN ceramic MEMS using injectable polymer-precursor technique

In this paper, a novel and cost-effective technology for the fabrication of high-temperature MEMS based on injectable polymer-derived ceramics is desc ribed. Micro-molds are fabricated out of SU-8 photoresist using standard UV -photolithographic processes. Liquid-phase polymers are then cast into the molds and converted into monolithic, fully-dense ceramics by thermal decomp osition. The resultant ceramic, based on the amorphous alloys of silicon, c arbon and nitrogen, possess excellent mechanical and physical properties fo r high-temperature applications. This capability for micro-casting is demon strated in the fabrication of simple single-layered, high aspect ratio SiCN microstructures. A polymer-based bonding technique for creating more compl ex three-dimensional structures is also presented. (C) 2001 Published by El sevier Science B.V.