Li-doped iron oxide thin films deposited on a porous ceramic substrate by a
liquid-phase method (LPD) were investigated as humidity sensors. Large var
iations in the resistance, up to about 4-5 order of magnitude, were observe
d by changing the relative humidity (RH) between 10 and 90%. The investigat
ed sensors show a quick and reversible response to cyclic variations in the
RH. The effects of pretreatment and Li content were investigated. The role
of Li on the response to water vapour of iron oxide thin films is discusse
d. (C) 2001 Elsevier Science B.V. All rights reserved.