Determination of the thickness of thin silane films on aluminium surfaces by means of spectroscopic ellipsometry

Authors
Franquet, A De Laet, J Schram, T Terryn, H Subramanian, V van Ooij, WJ Vereecken, J
Citation
A. Franquet et al., Determination of the thickness of thin silane films on aluminium surfaces by means of spectroscopic ellipsometry, THIN SOL FI, 384(1), 2001, pp. 37-45
Citations number
28
Categorie Soggetti
Apllied Physucs/Condensed Matter/Materiales Science","Material Science & Engineering
Journal title
THIN SOLID FILMS
ISSN journal
00406090 → ACNP
Volume
384
Issue
1
Year of publication
2001
Pages
37 - 45
Database
ISI
SICI code
0040-6090(20010301)384:1<37:DOTTOT>2.0.ZU;2-5
Abstract
The thickness of thin films of non-functional silane bis-1,2-(triethoxysily l)ethane (H5C2O)(3)Si-CH2CH2-Si(OC2H5)(3) (BTSE) deposited on aluminium sur faces is investigated using spectroscopic ellipsometry (250-1700 nm). The d ata processing of the ellipsometry spectra is carried out by means of simul ation and regression techniques. New advances in data processing, e.g. mult iple sample analysis and determination of thickness non-uniformity, are app lied to characterise these thin polymer films realistically. The influence of the concentration of the BTSE solution and the curing of the film is inv estigated. Optical thickness estimates are corroborated by independent auge r electron spectroscopy and transmission electron microscopy analysis. (C) 2001 Published by Elsevier Science B.V. All rights reserved.