Experimental and numerical analysis of surface melt dynamics in 200 ns-excimer laser crystallization of a-Si films on glass

In this work, the surface melt dynamics of amorphous Si films on glass was investigated experimentally and numerically for long pulse duration (200 ns ) excimer laser crystallization. The melting threshold, melt duration, dept h of fusion and critical fluence corresponding to the SLG regime were chara cterized by time-resolved reflectivity measurements, scanning electron micr oscopy and Raman spectroscopy. The numerical analysis of the laser melting- solidification process, including the explosive recrystallization phenomeno n, was demonstrated to be consistent with the experimental results. (C) 200 1 Elsevier Science B.V. All rights reserved.