MEASUREMENT OF THE THERMAL-PROPERTIES OF THIN DIELECTRIC FILMS BY A PROBE TECHNIQUE WITH PERIODIC HEATING .1. THEORY UNDERLYING THE METHOD

Authors
KRAVCHUN SN DAVITADZE ST MIZINA NS STRUKOV BA
Citation
Sn. Kravchun et al., MEASUREMENT OF THE THERMAL-PROPERTIES OF THIN DIELECTRIC FILMS BY A PROBE TECHNIQUE WITH PERIODIC HEATING .1. THEORY UNDERLYING THE METHOD, Physics of the solid state, 39(4), 1997, pp. 675-680
Citations number
15
Categorie Soggetti
Physics, Condensed Matter
Journal title
Physics of the solid state → ACNP
ISSN journal
10637834
Volume
39
Issue
4
Year of publication
1997
Pages
675 - 680
Database
ISI
SICI code
1063-7834(1997)39:4<675:MOTTOT>2.0.ZU;2-I
Abstract
The foundations of the theory underlying a method for measuring the th ermal properties of anisotropic solids and thin dielectric films depos ited on them are examined. An analysis of the solutions is performed, making it possible to establish the limiting possibilities of the peri odic-heating technique and the conditions needed for an experiment tha t would permit measurement of the specific heat and the thermal conduc tivity of films with good accuracy. (C) 1997 American Institute of Phy sics.