Grain populations in laser-crystallised silicon thin films on glass substrates

We investigate the polycrystalline microstructure, i.e. grain size and orie ntation distribution, that forms during laser crystallisation of amorphous silicon on glass substrates by a frequency doubled Nd:YVO4-laser operating at a wavelength of 532 nm. Transmission electron microscopy reveals that th e grains have an average width from 0.25 to 3 mum and a length of several 1 0 mum. Electron back-scattering diffraction indicates that the grain orient ation of the poly-Si films is textured. Type and extent of texturing depend in a complex way on the thickness of the crystallised amorphous silicon la yer and on whether or not a buffer layer is present. (C) 2001 Elsevier Scie nce B.V. All rights reserved.