Manufacturing of surface micromachined structures for chemical sensors

Authors
Moldovan, C Kim, BH Raible, S Moagar, V
Citation
C. Moldovan et al., Manufacturing of surface micromachined structures for chemical sensors, THIN SOL FI, 383(1-2), 2001, pp. 321-324
Citations number
3
Categorie Soggetti
Apllied Physucs/Condensed Matter/Materiales Science","Material Science & Engineering
Journal title
THIN SOLID FILMS
ISSN journal
00406090 → ACNP
Volume
383
Issue
1-2
Year of publication
2001
Pages
321 - 324
Database
ISI
SICI code
0040-6090(20010215)383:1-2<321:MOSMSF>2.0.ZU;2-I
Abstract
This paper presents the technological process, the simulation and the micro fabrication of polysilicon structures used as mass sensitive sensors for ga s detection. The microstructures are double-ended and released, polysilicon microbridges, realised by sacrificial layer technique. The surface microma chining compatibility with the integrated circuits microfabrication is disc ussed and the bridge oscillation observed. (C) 2001 Elsevier Science B.V. A ll rights reserved.