Porous silicon a transducer material for a high-sensitive (bio)chemical sensor: effect of a porosity, pores morphologies and a large surface area on a sensitivity

The over Nernstian response of Porous Silicon (PS) devices towards sodium i ons have been reported [1]. This paper aims to give interpretations and to proposal model associated to a non-classical electrochemical behaviour. The capacity measurements were made to test the functionalised pS samples with regard to their porosities, porous layer thicknesses and pores morphologie s. We have studied samples with different resistivities of bulk silicon (Si ). Both PS samples prepared from, either, heavily or lightly doped substrat es have shown an increase of the sensitivity with the porosity. (C) 2001 Pu blished by Elsevier Science B.V. All rights reserved.