Study of tribological properties of coating/substrate system in micrometerand nanometer scales with a scanning probe microscope

We have used a scanning probe microscope equipped with a custom made diamon d tip to study tribological properties of an inorganic-organic hybrid Si, O , H, and C coating produced by plasma enhanced chemical vapor deposition (P ECVD) on siloxane/acrylic/polycarbonate multilayer substrates and on glass substrates. The micro indentation hardness and micro mar resistance were me asured under different normal forces, and the critical loads for cracking, delamination, and chipping were evaluated. The effects of substrate, coatin g thickness, and interfacial adhesion on tribological properties of the coa ting/substrate systems are discussed. The results show that increasing coat ing thickness and strengthening interfacial adhesion can effectively inhibi t cracking, delamination, and chipping of the coating/substrate systems und er wear. Improving the physical properties of the PECVD coating and substra te, such as enhancing elastic recovery, reducing plasticity and brittleness , and matching the properties of coating and substrate better can improve t he wear resistance of the systems further. (C) 2001 Elsevier Science Ltd. A ll rights reserved.