Diamond synthesis by high-gravity DC plasma CVD (HGCVD) with active control of the substrate temperature

In the first part of this paper, subatmospheric CVD methods for diamond thi n film synthesis under normal gravity and other conditions are reviewed, fo llowing their increased capability for large-scale manufacturing. Emphasis is given to current problems and advances in moderate pressure d.c. plasma CVD operating under normal gravity and high-gravity. In the second part, an experimental technique aimed at solving the problem of temperature uniform ity on the substrate surface at high gravity is presented. This technique i mproved temperature uniformity during diamond deposition at various gravity conditions and allowed a more accurate assessment of the influence of grav ity on diamond growth and thin-film morphology. (C) 2001 Elsevier Science L td. All rights reserved.