Quantitative evaluation of electron beam writing in passivated gold nanoclusters

Authors
Bedson, TR Palmer, RE Jenkins, TE Hayton, DJ Wilcoxon, JP
Citation
Tr. Bedson et al., Quantitative evaluation of electron beam writing in passivated gold nanoclusters, APPL PHYS L, 78(13), 2001, pp. 1921-1923
Citations number
20
Categorie Soggetti
Apllied Physucs/Condensed Matter/Materiales Science
Journal title
APPLIED PHYSICS LETTERS
ISSN journal
00036951 → ACNP
Volume
78
Issue
13
Year of publication
2001
Pages
1921 - 1923
Database
ISI
SICI code
0003-6951(20010326)78:13<1921:QEOEBW>2.0.ZU;2-B
Abstract
We report a quantitative investigation of direct electron beam writing in m onolayer films of passivated gold nanoclusters. In this process, the passiv ating organic ligands are (partially) removed to create gold-based nanostru ctures. We report the fabrication of lines with width as narrow as 26 nm, w hile measurements of the linewidth as a function of dose allow us to obtain a quantitative measure of the sensitivity, for comparison with established negative tone resists. (C) 2001 American Institute of Physics.