Conducting polymers in microelectronics

Authors
Citation
M. Angelopoulos, Conducting polymers in microelectronics, IBM J RES, 45(1), 2001, pp. 57-75
Citations number
139
Categorie Soggetti
Multidisciplinary,"Computer Science & Engineering
Journal title
IBM JOURNAL OF RESEARCH AND DEVELOPMENT
ISSN journal
00188646 → ACNP
Volume
45
Issue
1
Year of publication
2001
Pages
57 - 75
Database
ISI
SICI code
0018-8646(200101)45:1<57:CPIM>2.0.ZU;2-3
Abstract
Conjugated polymers in the nondoped and doped conducting state have an arra y of potential applications in the microelectronics industry. Conducting po lymers are effective discharge layers as well as conducting resists in elec tron beam lithography, find applications in metallization (electrolytic and electroless) of plated through-holes for printed circuit board technology, provide excellent electrostatic discharge protection for packages and hous ings of electronic equipment, provide excellent corrosion protection for me tals, and may have applications in electromagnetic interference shielding. This paper reviews some of these applications and briefly describes possibl e future applications of conducting polymers for use as interconnections or for electronic devices.