Flexible polyimide-based intracortical electrode arrays with bioactive capability

The promise of advanced neuroprosthetic systems to significantly improve th e quality of life for a segment of the deaf, blind, or paralyzed population hinges on the development of an efficacious, and safe, multichannel neural interface for the central nervous system, The candidate implantable device that is to provide such an interface must exceed a host of exacting design parameters. We present a thin-film, polyimide-based, multichannel intracor tical Bio-MEMS interface manufactured with standard planar photo-lithograph ic CMOS-compatible techniques on 4-in silicon wafers. The use of polyimide provides a mechanically flexible substrate which can be manipulated into un ique three-dimensional designs. Polyimide also provides an ideal surface fo r the selective attachment of various important bioactive species onto the device in order to encourage favorable long-term reactions at the tissue-el ectrode interface. Structures have an integrated polyimide cable providing efficient contact points for a high-density connector. This report details in vivo and in vitro device characterization of the biological, electrical and mechanical properties of these arrays. Results suggest that these array s could be a candidate device for long-term neural implants.