Mixed vanadium oxide thin films, as VO2 for the main composition are materi
als for uncooled microbolometer due to their high temperature coefficient o
f resistance (TCR) at room temperature, This paper describes the design and
fabrication of 8-element linear array IR uncooled microbolometers using th
e films acid micromachining technology. The characteristics of the array is
investigated in the spectral region of 8-12 mum. The fabricated detectors
exhibit responsivity of up to 10KV/W, typical detectivity of 1.89x10(8)cmH(
1/2)/W, and thermal time constant of 11ms, at 296K and at a frequency of 30
Hz, Furthermore, The uncorrected response uniformity of the linear array bo
lometers is less than 20%.