Practical scheme for three-dimensional simulation of electron cyclotron resonance plasma reactors

A three-dimensional simulation code which calculates wave propagation, plas ma transport, and gas phase chemical reactions self-consistently in an elec tron cyclotron resonance plasma reactor has been developed. The code is des igned to treat the three-dimensional inhomogeneity with a reasonable accura cy in a realistic configuration of the reactor within an acceptable computa tional time using common computer resources. The profiles of electromagneti c wave fields and the temporal evolution of plasma parameters and radical d ensities in a bounded, inhomogeneous, cylindrical system have been calculat ed. The code can resolve azimuthal asymmetry of the plasma associated with a rectangular waveguide coupling or an asymmetric injection of reactive gas es as well as the radial and axial variations. (C) 2001 American Institute of Physics.