Patterning of sp(3)- and sp(2)-bonded carbon by atomic-force microscopy

We report the pattering of sp(3)- and sp(2)-bonded carbon by using conducti ng atomic-force microscopy (AFM) working in the noncontact mode. A ta-C fil m with similar to 80% sp(3) bonds was scanned by the conducting AFM with a biased tip. A current image that clearly shows gray/white and black feature s was obtained while scanning in the noncontact mode. These features were p roposed to be the result of the different electron emission abilities of th e sp(3)- and sp(2)-bonded carbon in the film. The result not only enables u s to image the distribution of the sp(3) and sp(2) bonds of a-C, but also e xtends the AFM to provide the electron emission information of a-C on a nan ometer scale. (C) 2001 American Institute of Physics.