The growth and vertical organization of CdSe quantum dots in three-layer st
acks consisting of CdSe with a nominal thickness of 2.5 monolayers (ML) and
ZnSe spacers with thicknesses between 10 and 20 ML was investigated by ref
lection high energy electron diffraction during the growth and different tr
ansmission electron microscopy techniques. The samples were grown by molecu
lar beam epitaxy at 400 degreesC. It was found that up to 10 ML spacer thic
kness all three CdSe layers and ZnSe spacers form one broad (Cd, Zn)Se allo
y layer with a small Cd concentration containing Cd-rich islands with a siz
e of similar to 15 nm. For spacers with a larger thickness (12-20 ML) three
separated ternary (Cd, Zn)Se layers are observed which contain Cd-rich inc
lusions (small islands) with a size of less than 10 nm. A preferential vert
ical correlation of the small islands occurs for the 12 ML spacer thickness
. With increasing spacer thickness, the number of the correlated small isla
nds is reduced displaying a tendency to uncorrelated growth. (C) 2001 Ameri
can Institute of Physics.