Phosphorus-doped thin silica films characterized by magic-angle spinning nuclear magnetic resonance spectroscopy

Magic-angle spinning nuclear magnetic resonance spectra of P-31 and Si-29 h ave been achieved for a thin silica film doped with only 1.8% P-31 and depo sited by plasma enhanced chemical vapor deposition on a pure silicon wafer. The observation of a symmetric P-31 chemical shift tensor is consistent wi th a three-fold symmetric (-O-)(3)P=O chemical structure. We find that the glass structure is very similar to that found in fiber preforms. (C) 2001 A merican Institute of Physics.