Studies on plasma polymerization of hexamethyldisiloxane in the presence of different carrier gases

Plasma polymerization of hexamethyldisiloxane(HMDSO) in the presence of dif ferent carrier gases such as H-2, He, N-2, Ar, and O-2 was carried out usin g an inductively coupled electrodeless glow discharge. The polymerization k inetics showed that the monomer HMDSO plasma-polymerized at different rates from low to high for the carrier gases H-2, He, N-2, Ar, and O-2 in that o rder. The products were studied using FTIR, electron spectroscopy for chemi cal analysis, and elemental analysis. The results indicated that HMDSO mole cules underwent different degrees of fragmentation in plasma polymerization for different carrier gases and radio frequency (RF) powers. The polymer d eposition rate and the structures of products were mainly dependent on mole cular fragmentation, which varied with carrier gas and imposed RF power. O- 2 and H-2 gases can incorporate in the plasma polymers to form products con taining more oxygen or hydrogen components, while other gases such as N-2 h ave no detectable component in products. (C) 2001 John Wiley & Sons, Inc.