Vapor pressures of the copper and yttrium beta-diketonate MOCVD precursors

Authors
Colominas, C Lau, KH Hildenbrand, DL Crouch-Baker, S Sanjurjo, A
Citation
C. Colominas et al., Vapor pressures of the copper and yttrium beta-diketonate MOCVD precursors, J CHEM EN D, 46(2), 2001, pp. 446-450
Citations number
15
Categorie Soggetti
Chemistry,"Chemical Engineering
Journal title
JOURNAL OF CHEMICAL AND ENGINEERING DATA
ISSN journal
00219568 → ACNP
Volume
46
Issue
2
Year of publication
2001
Pages
446 - 450
Database
ISI
SICI code
0021-9568(200103/04)46:2<446:VPOTCA>2.0.ZU;2-H
Abstract
The vapor pressures and vapor molecular weights of the copper and yttrium b eta -diketonate MOCVD precursors CU(C11H19O2)(2) (c) and Y(C11H19O2)(3) (c) were measured by a;torsion-effusion/mass-loss method in the ranges (346 to 375) K and (361 to 387) K, respectively. The molecular weight data indicat e that the saturated vapors of both precursors are highly monomeric. Vapor pressures, estimated to be accurate within 5%, are presented in equation fo rm for reliable extrapolation to higher temperatures. The results are compa red with other determinations in the literature.