Effects of condensible plasma impurities on the material erosion behaviors
have been investigated by improving the previous zero-dimensional model. Th
e new model can describe more precisely the transition from the enhanced er
osion due to impurities to reduced erosion with the formation of the impuri
ty film. Model predictions have been proven by the experimental observation
s in NAGDIS-I. A water-cooled molybdenum target plate was bombarded with ar
gon plasmas into which methane was introduced as carbon impurity. As the fl
ow rate of the methane gas was increased, MoI emission line intensity, corr
esponding to sputtered particle flux, has been observed to decrease to a gr
eat deal. (C) 2001 Published by Elsevier Science B.V.