Aluminum oxidation by ozone produces an aluminum oxide layer which is super
ior in its corrosion properties compared to natural oxide, as measured by e
lectrochemical methods. The electrochemically measured impedance of the O-3
-grown films is similar to 10 times greater than that of O-2-grown films of
equivalent thickness. An enhanced pitting potential is observed for the O-
3-grown oxide film. Transmission electron microscopy results show that the
pore size of O-3-grown oxide films is considerably smaller than that of O-2
-grown films. Transmission electron microscopy electron diffraction studies
show that the amorphous O-3-grown films are similar to 4% more dense than
the O-2-grown film. The initial sticking coefficient for ozone on atomicall
y clean polycrystalline aluminum is 3.8 times larger than for oxygen at 300
K