On the optical constants of TiO2 thin films. Ellipsometric studies

TiO2 thin films were obtained on unheated glass substrates by a DC reactive magnetron sputtering method. The as-deposited films exhibit an amorphous s tructure as observed from X-ray diffraction (XRD) patterns. The structure c hanges to a mixed one of 70% anatase and 30% rutile after heat treatment in air in the temperature range 293-673 K. Using ellipsometric measurements, and a computer to solve the corresponding equations, a modeling technique w as used to find the optical constants of the studied thin films. A sensitiv ity analysis was performed. (C) 2001 Elsevier Science Ltd. All rights reser ved.